Inventor

STECK SABINE

DE2 patents

Patents

2 patents

US6750096B2Jun 15, 2004

Trench capacitor with buried plate and method for its production

INFINEON TECHNOLOGIES AG17 citations80

US6777303B2Aug 17, 2004

Method for fabricating an insulation collar in a trench capacitor

INFINEON TECHNOLOGIES AG11 citations70