Inventor
YANAGI YOSHIHIRO
JP9 patents
⚠️ This page may combine multiple inventors who share the name “YANAGI YOSHIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD
6 patentsUS5888413AMar 30, 1999
Plasma processing method and apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD125 citations97
US5558722ASep 24, 1996
Plasma processing apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD80 citations95
US5922223AJul 13, 1999
Plasma processing method and apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD28 citations92
US5711850AJan 27, 1998
Plasma processing apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD13 citations73
US7205250B2Apr 17, 2007
Plasma processing method and apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD0 citations51
US6875698B2Apr 5, 2005
Dry etching method
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD0 citations49