Inventor
JACQUES ROBERT
US3 patents
Patents
3 patentsUS7158840B2Jan 2, 2007
Tuning control parameters of vibration reduction and motion control systems for fabrication equipment and robotic systems
CYMER INC20 citations87
US6959484B1Nov 1, 2005
System for vibration control
CYMER INC17 citations79
US8872123B2Oct 28, 2014
Method of timing laser beam pulses to regulate extreme ultraviolet light dosing
CYMER INC3 citations60