Inventor

MATSUMARU HIROKI

JP4 patents

⚠️ This page may combine multiple inventors who share the name “MATSUMARU HIROKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

OCTEC INC

2 patents

US7585386B2Sep 8, 2009

Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method

OCTEC INC33 citations91

US7922862B2Apr 12, 2011

Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method

OCTEC INC9 citations83

TOKYO ELECTRON LTD

1 patent

US7767055B2Aug 3, 2010

Capacitive coupling plasma processing apparatus

TOKYO ELECTRON LTD5 citations59

TAKAHASHI SYUICHI

1 patent

US8142609B2Mar 27, 2012

Plasma processing apparatus

TAKAHASHI SYUICHI3 citations53