P

Inventor

VAEZ-IRAVANI MEHDI

US109 patents
⚠️ This page may combine multiple inventors who share the name “VAEZ-IRAVANI MEHDI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR TECH CORP

22 patents
US7525649B1Apr 28, 2009

Surface inspection system using laser line illumination with two dimensional imaging

KLA TENCOR TECH CORP164 citations98
US7315022B1Jan 1, 2008

High-speed electron beam inspection

KLA TENCOR TECH CORP59 citations98
US6781688B2Aug 24, 2004

Process for identifying defects in a substrate having non-uniform surface properties

KLA TENCOR TECH CORP90 citations98
US6710876B1Mar 23, 2004

Metrology system using optical phase

KLA TENCOR TECH CORP100 citations98
US7068363B2Jun 27, 2006

Systems for inspection of patterned or unpatterned wafers and other specimen

KLA TENCOR TECH CORP206 citations97
US6724473B2Apr 20, 2004

Method and system using exposure control to inspect a surface

KLA TENCOR TECH CORP76 citations97
US7295303B1Nov 13, 2007

Methods and apparatus for inspecting a sample

KLA TENCOR TECH CORP58 citations96
US7130039B2Oct 31, 2006

Simultaneous multi-spot inspection and imaging

KLA TENCOR TECH CORP76 citations96
US6538730B2Mar 25, 2003

Defect detection system

KLA TENCOR TECH CORP139 citations96
US7607647B2Oct 27, 2009

Stabilizing a substrate using a vacuum preload air bearing chuck

KLA TENCOR TECH CORP96 citations95
US7088443B2Aug 8, 2006

System for detecting anomalies and/or features of a surface

KLA TENCOR TECH CORP43 citations93
US7782452B2Aug 24, 2010

Systems and method for simultaneously inspecting a specimen with two distinct channels

KLA TENCOR TECH CORP20 citations92
US7345754B1Mar 18, 2008

Fourier filters and wafer inspection systems

KLA TENCOR TECH CORP40 citations92
US7079238B2Jul 18, 2006

Sample inspection system

KLA TENCOR TECH CORP13 citations92
US7492451B2Feb 17, 2009

Simultaneous multi-spot inspection and imaging

KLA TENCOR TECH CORP31 citations91
US6956644B2Oct 18, 2005

Systems and methods for a wafer inspection system using multiple angles and multiple wavelength illumination

KLA TENCOR TECH CORP34 citations91
US6922236B2Jul 26, 2005

Systems and methods for simultaneous or sequential multi-perspective specimen defect inspection

KLA TENCOR TECH CORP36 citations90
US7319229B2Jan 15, 2008

Illumination apparatus and methods

KLA TENCOR TECH CORP11 citations84
US7119897B2Oct 10, 2006

Sample inspection system

KLA TENCOR TECH CORP18 citations84
US7385688B1Jun 10, 2008

Multi-spot illumination and collection optics for highly tilted wafer planes

KLA TENCOR TECH CORP17 citations82
US7218392B2May 15, 2007

Systems and methods for a wafer inspection system using multiple angles and multiple wavelength illumination

KLA TENCOR TECH CORP11 citations82
US7365834B2Apr 29, 2008

Optical system for detecting anomalies and/or features of surfaces

KLA TENCOR TECH CORP10 citations80

KLA TENCOR CORP

18 patents
US6639662B2Oct 28, 2003

Sample inspection system

KLA TENCOR CORP85 citations99
US6608676B1Aug 19, 2003

System for detecting anomalies and/or features of a surface

KLA TENCOR CORP159 citations99
US6208411B1Mar 27, 2001

Massively parallel inspection and imaging system

KLA TENCOR CORP173 citations99
US6201601B1Mar 13, 2001

Sample inspection system

KLA TENCOR CORP359 citations99
US5798829AAug 25, 1998

Single laser bright field and dark field system for detecting anomalies of a sample

KLA TENCOR CORP258 citations99
US6657715B2Dec 2, 2003

Sample inspection system

KLA TENCOR CORP26 citations96
US6618134B2Sep 9, 2003

Sample inspection system

KLA TENCOR CORP27 citations96
US6384910B2May 7, 2002

Sample inspection system

KLA TENCOR CORP57 citations96
US7989729B1Aug 2, 2011

Detecting and repairing defects of photovoltaic devices

KLA TENCOR CORP48 citations93
US6578961B2Jun 17, 2003

Massively parallel inspection and imaging system

KLA TENCOR CORP33 citations93
US9291575B2Mar 22, 2016

Wafer inspection

KLA TENCOR CORP16 citations92
US7623229B1Nov 24, 2009

Systems and methods for inspecting wafers

KLA TENCOR CORP22 citations92
US6891611B1May 10, 2005

Sample inspection system

KLA TENCOR CORP17 citations92
US7733111B1Jun 8, 2010

Segmented optical and electrical testing for photovoltaic devices

KLA TENCOR CORP28 citations91
US6862096B2Mar 1, 2005

Defect detection system

KLA TENCOR CORP22 citations90
US7709794B2May 4, 2010

Defect detection using time delay lock-in thermography (LIT) and dark field LIT

KLA TENCOR CORP23 citations88
US8953869B2Feb 10, 2015

Apparatus and methods for inspecting extreme ultra violet reticles

KLA TENCOR CORP13 citations84
US7116413B2Oct 3, 2006

Inspection system for integrated applications

KLA TENCOR CORP17 citations84

ZHAO GUOHENG

4 patents

VAEZ-IRAVANI MEHDI

2 patents

APPLIED MATERIALS INC

2 patents

IBM

1 patent

ROMANOVSKY ANATOLY

1 patent

Showing the top 50 of 109 patents by PatentIndex Score.