Inventor
VAEZ-IRAVANI MEHDI
US109 patents
⚠️ This page may combine multiple inventors who share the name “VAEZ-IRAVANI MEHDI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR TECH CORP
22 patentsUS7525649B1Apr 28, 2009
Surface inspection system using laser line illumination with two dimensional imaging
KLA TENCOR TECH CORP164 citations98
US7315022B1Jan 1, 2008
High-speed electron beam inspection
KLA TENCOR TECH CORP59 citations98
US6781688B2Aug 24, 2004
Process for identifying defects in a substrate having non-uniform surface properties
KLA TENCOR TECH CORP90 citations98
US6710876B1Mar 23, 2004
Metrology system using optical phase
KLA TENCOR TECH CORP100 citations98
US7068363B2Jun 27, 2006
Systems for inspection of patterned or unpatterned wafers and other specimen
KLA TENCOR TECH CORP206 citations97
US6724473B2Apr 20, 2004
Method and system using exposure control to inspect a surface
KLA TENCOR TECH CORP76 citations97
US7295303B1Nov 13, 2007
Methods and apparatus for inspecting a sample
KLA TENCOR TECH CORP58 citations96
US7130039B2Oct 31, 2006
Simultaneous multi-spot inspection and imaging
KLA TENCOR TECH CORP76 citations96
US6538730B2Mar 25, 2003
Defect detection system
KLA TENCOR TECH CORP139 citations96
US7607647B2Oct 27, 2009
Stabilizing a substrate using a vacuum preload air bearing chuck
KLA TENCOR TECH CORP96 citations95
US7088443B2Aug 8, 2006
System for detecting anomalies and/or features of a surface
KLA TENCOR TECH CORP43 citations93
US7782452B2Aug 24, 2010
Systems and method for simultaneously inspecting a specimen with two distinct channels
KLA TENCOR TECH CORP20 citations92
US7345754B1Mar 18, 2008
Fourier filters and wafer inspection systems
KLA TENCOR TECH CORP40 citations92
US7079238B2Jul 18, 2006
Sample inspection system
KLA TENCOR TECH CORP13 citations92
US7492451B2Feb 17, 2009
Simultaneous multi-spot inspection and imaging
KLA TENCOR TECH CORP31 citations91
US6956644B2Oct 18, 2005
Systems and methods for a wafer inspection system using multiple angles and multiple wavelength illumination
KLA TENCOR TECH CORP34 citations91
US6922236B2Jul 26, 2005
Systems and methods for simultaneous or sequential multi-perspective specimen defect inspection
KLA TENCOR TECH CORP36 citations90
US7319229B2Jan 15, 2008
Illumination apparatus and methods
KLA TENCOR TECH CORP11 citations84
US7119897B2Oct 10, 2006
Sample inspection system
KLA TENCOR TECH CORP18 citations84
US7385688B1Jun 10, 2008
Multi-spot illumination and collection optics for highly tilted wafer planes
KLA TENCOR TECH CORP17 citations82
US7218392B2May 15, 2007
Systems and methods for a wafer inspection system using multiple angles and multiple wavelength illumination
KLA TENCOR TECH CORP11 citations82
US7365834B2Apr 29, 2008
Optical system for detecting anomalies and/or features of surfaces
KLA TENCOR TECH CORP10 citations80
KLA TENCOR CORP
18 patentsUS6639662B2Oct 28, 2003
Sample inspection system
KLA TENCOR CORP85 citations99
US6608676B1Aug 19, 2003
System for detecting anomalies and/or features of a surface
KLA TENCOR CORP159 citations99
US6208411B1Mar 27, 2001
Massively parallel inspection and imaging system
KLA TENCOR CORP173 citations99
US6201601B1Mar 13, 2001
Sample inspection system
KLA TENCOR CORP359 citations99
US5798829AAug 25, 1998
Single laser bright field and dark field system for detecting anomalies of a sample
KLA TENCOR CORP258 citations99
US6657715B2Dec 2, 2003
Sample inspection system
KLA TENCOR CORP26 citations96
US6618134B2Sep 9, 2003
Sample inspection system
KLA TENCOR CORP27 citations96
US6384910B2May 7, 2002
Sample inspection system
KLA TENCOR CORP57 citations96
US7989729B1Aug 2, 2011
Detecting and repairing defects of photovoltaic devices
KLA TENCOR CORP48 citations93
US6578961B2Jun 17, 2003
Massively parallel inspection and imaging system
KLA TENCOR CORP33 citations93
US9291575B2Mar 22, 2016
Wafer inspection
KLA TENCOR CORP16 citations92
US7623229B1Nov 24, 2009
Systems and methods for inspecting wafers
KLA TENCOR CORP22 citations92
US6891611B1May 10, 2005
Sample inspection system
KLA TENCOR CORP17 citations92
US7733111B1Jun 8, 2010
Segmented optical and electrical testing for photovoltaic devices
KLA TENCOR CORP28 citations91
US6862096B2Mar 1, 2005
Defect detection system
KLA TENCOR CORP22 citations90
US7709794B2May 4, 2010
Defect detection using time delay lock-in thermography (LIT) and dark field LIT
KLA TENCOR CORP23 citations88
US8953869B2Feb 10, 2015
Apparatus and methods for inspecting extreme ultra violet reticles
KLA TENCOR CORP13 citations84
US7116413B2Oct 3, 2006
Inspection system for integrated applications
KLA TENCOR CORP17 citations84
ZHAO GUOHENG
4 patentsUS8891079B2Nov 18, 2014
Wafer inspection
ZHAO GUOHENG57 citations97
US8194301B2Jun 5, 2012
Multi-spot scanning system and method
ZHAO GUOHENG20 citations92
US9176072B2Nov 3, 2015
Dark field inspection system with ring illumination
ZHAO GUOHENG10 citations84
US8436554B2May 7, 2013
LED solar illuminator
ZHAO GUOHENG9 citations83
VAEZ-IRAVANI MEHDI
2 patentsAPPLIED MATERIALS INC
2 patentsIBM
1 patentROMANOVSKY ANATOLY
1 patentShowing the top 50 of 109 patents by PatentIndex Score.