Inventor

KOUMURA Kazuhiko

JP2 patents

Patents

2 patents

US9607849B2Mar 28, 2017

Pattern-forming method and resist underlayer film-forming composition

JSR CORP2 citations70

US9091922B2Jul 28, 2015

Resin composition, resist underlayer film, resist underlayer film-forming method and pattern-forming method

JSR CORP1 citations46