Inventor

ZHAO GUOHENG

US95 patents

⚠️ This page may combine multiple inventors who share the name “ZHAO GUOHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZHAO GUOHENG

KLA TENCOR CORP

Sample inspection system

System for detecting anomalies and/or features of a surface

Sample inspection system

In-situ metalization monitoring using eddy current and optical measurements

TDI sensor in a darkfield system

Sample inspection system

Sample inspection system

Sample inspection system

Methods and apparatus for polarized wafer inspection

Apparatus and methods for improving defect detection sensitivity

Detecting and repairing defects of photovoltaic devices

Wafer inspection

Overlay error detection

Sample inspection system

Segmented optical and electrical testing for photovoltaic devices

Defect detection using time delay lock-in thermography (LIT) and dark field LIT

Methods and apparatus for polarized wafer inspection

Method and system for optical three dimensional topography measurement

In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning

KLA TENCOR TECH CORP

Surface inspection system using laser line illumination with two dimensional imaging

Optical system for measuring samples using short wavelength radiation

Metrology system using optical phase

Method and system using exposure control to inspect a surface

Methods and apparatus for inspecting a sample

System for scatterometric measurements and applications

Stabilizing a substrate using a vacuum preload air bearing chuck

Overlay error detection

System for detecting anomalies and/or features of a surface

System for MEMS inspection and characterization

Fourier filters and wafer inspection systems

System for scatterometric measurements and applications

Sample inspection system

System for measuring a sample with a layer containing a periodic diffracting structure

Illumination apparatus and methods

Sample inspection system

Sample inspection system

ZHAO GUOHENG

Wafer inspection

Multi-spot scanning system and method

Dark field inspection system with ring illumination

Measuring sheet resistance and other properties of a semiconductor

LED solar illuminator

KLA TENCOR

Apparatus and methods for performing self-clearing optical measurements

Apparatus and methods for detecting killer particles during chemical mechanical polishing

KLA TECHNOLOGIES CORP

Systems for measuring periodic structures

ROMANOVSKY ANATOLY

Wafer inspection

3I SYSTEMS INC

Method and system for improved defect sensitivity for inspecting surfaces

KLA CORP

Radial polarizer for particle detection

APPLIED MATERIALS INC

In-situ, real-time detection of particulate defects in a fluid

VAEZ-IRAVANI MEHDI

Enhanced focusing capability on a sample using a spot matrix

YOUNG SCOTT A

Combined semiconductor metrology system