Inventor

OOTSUKI YUUTO

JP2 patents

⚠️ This page may combine multiple inventors who share the name “OOTSUKI YUUTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI CHEMICAL CO LTD

1 patent

US6615499B1Sep 9, 2003

Method for producing cerium oxide, cerium oxide abrasive, method for polishing substrate using the same and method for manufacturing semiconductor device

HITACHI CHEMICAL CO LTD28 citations90

FUKASAWA MASATO

1 patent

US9293344B2Mar 22, 2016

Cmp polishing slurry and method of polishing substrate

FUKASAWA MASATO2 citations59