Inventor

PATEL SHARDUL S

US7 patents

⚠️ This page may combine multiple inventors who share the name “PATEL SHARDUL S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

3 patents

US12154766B2Nov 26, 2024

Ion source having different modes of operation

APPLIED MATERIALS INC0 citations60

US12094681B2Sep 17, 2024

Hybrid ion source for aluminum ion generation using a target holder and a solid target

APPLIED MATERIALS INC0 citations60

US12040154B2Jul 16, 2024

Hybrid ion source for aluminum ion generation using organoaluminium compounds and a solid target

APPLIED MATERIALS INC0 citations60

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

2 patents

US10704693B2Jul 7, 2020

Cryogenic ferrofluid sealed rotary union

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC3 citations71

US9793086B2Oct 17, 2017

SiC coating in an ion implanter

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations49

VARIAN SEMICONDUCTOR EQUIPMENT

1 patent

US9384937B2Jul 5, 2016

SiC coating in an ion implanter

VARIAN SEMICONDUCTOR EQUIPMENT5 citations81

BUFF JAMES S

1 patent

US8466431B2Jun 18, 2013

Techniques for improving extracted ion beam quality using high-transparency electrodes

BUFF JAMES S3 citations54