Inventor
SAITO MISAKO
JP15 patents
⚠️ This page may combine multiple inventors who share the name “SAITO MISAKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
12 patentsUS7993458B2Aug 9, 2011
Vacuum processing apparatus and method
TOKYO ELECTRON LTD17 citations84
US9960056B2May 1, 2018
Substrate cleaning method, substrate cleaning apparatus and vacuum processing system
TOKYO ELECTRON LTD10 citations82
US7208428B2Apr 24, 2007
Method and apparatus for treating article to be treated
TOKYO ELECTRON LTD17 citations82
US7420118B2Sep 2, 2008
Electric wire and cable with coating/covering of polyvinyl chloride family resin composition
TOKYO ELECTRON LTD5 citations73
US9881815B2Jan 30, 2018
Substrate cleaning method, substrate cleaning device, and vacuum processing device
TOKYO ELECTRON LTD4 citations72
US6403498B1Jun 11, 2002
Method and device for treating substrate
TOKYO ELECTRON LTD4 citations62
US6337365B1Jan 8, 2002
Electronic/electric components used in clean room and substrate treatment apparatus
TOKYO ELECTRON LTD5 citations62
US6077894AJun 20, 2000
Instrument and mounting equipment used in clean room
TOKYO ELECTRON LTD2 citations62
US8040504B2Oct 18, 2011
Defect inspecting method and defect inspecting apparatus
TOKYO ELECTRON LTD4 citations61
US7946152B2May 24, 2011
Apparatus and method for measuring the concentration of organic gas
TOKYO ELECTRON LTD1 citations51
US8911955B2Dec 16, 2014
Virus detection device and virus detection method
TOKYO ELECTRON LTD0 citations50
US9875915B2Jan 23, 2018
Method for removing metal contamination and apparatus for removing metal contamination
TOKYO ELECTRON LTD0 citations36