Inventor
CHIANG MING-HSIUNG
TW6 patents
Patents
6 patentsUS6143604ANov 7, 2000
Method for fabricating small-size two-step contacts for word-line strapping on dynamic random access memory (DRAM)
TAIWAN SEMICONDUCTOR MFG252 citations98
US6168984B1Jan 2, 2001
Reduction of the aspect ratio of deep contact holes for embedded DRAM devices
TAIWAN SEMICONDUCTOR MFG61 citations96
US6168989B1Jan 2, 2001
Process for making new and improved crown-shaped capacitors on dynamic random access memory cells
TAIWAN SEMICONDUCTOR MFG33 citations92
US6136695AOct 24, 2000
Method for fabricating a self-aligned contact
TAIWAN SEMICONDUCTOR MFG23 citations92
US6555435B2Apr 29, 2003
Method to eliminate shorts between adjacent contacts due to interlevel dielectric voids
TAIWAN SEMICONDUCTOR MFG2 citations62
US6365464B1Apr 2, 2002
Method to eliminate shorts between adjacent contacts due to interlevel dielectric voids
TAIWAN SEMICONDUCTOR MFG5 citations62