Inventor
TARIQ FAISAL
US9 patents
⚠️ This page may combine multiple inventors who share the name “TARIQ FAISAL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MYKROLIS CORP
4 patentsUS6681787B2Jan 27, 2004
System and method of operation of a digital mass flow controller
MYKROLIS CORP79 citations96
US6640822B2Nov 4, 2003
System and method of operation of a digital mass flow controller
MYKROLIS CORP39 citations94
US6449571B1Sep 10, 2002
System and method for sensor response linearization
MYKROLIS CORP38 citations91
US6865520B2Mar 8, 2005
System and method for filtering output in mass flow controllers and mass flow meters
MYKROLIS CORP5 citations72
CELERITY INC
3 patentsUS7216019B2May 8, 2007
Method and system for a mass flow controller with reduced pressure sensitivity
CELERITY INC49 citations91
US7133785B2Nov 7, 2006
Valve control system and method
CELERITY INC31 citations90
US7113895B2Sep 26, 2006
System and method for filtering output in mass flow controllers and mass flow meters
CELERITY INC6 citations72