Inventor

KHOLODENKO ARNOLD V

US6 patents

⚠️ This page may combine multiple inventors who share the name “KHOLODENKO ARNOLD V”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

4 patents

US6490145B1Dec 3, 2002

Substrate support pedestal

APPLIED MATERIALS INC86 citations97

US6828241B2Dec 7, 2004

Efficient cleaning by secondary in-situ activation of etch precursor from remote plasma source

APPLIED MATERIALS INC144 citations96

US6689418B2Feb 10, 2004

Apparatus for wafer rinse and clean and edge etching

APPLIED MATERIALS INC9 citations73

US7572334B2Aug 11, 2009

Apparatus for fabricating large-surface area polycrystalline silicon sheets for solar cell application

APPLIED MATERIALS INC5 citations59

APPILED MATERIALS INC

1 patent

US6676760B2Jan 13, 2004

Process chamber having multiple gas distributors and method

APPILED MATERIALS INC55 citations94

(unassigned)

1 patent

US6736668B1May 18, 2004

High temperature electrical connector

16 citations82