Inventor
KIM KYE-WEON
KR6 patents
Patents
6 patentsUS6650408B2Nov 18, 2003
Method for inspecting a polishing pad in a semiconductor manufacturing process, an apparatus for performing the method, and a polishing device adopting the apparatus
SAMSUNG ELECTRONICS CO LTD12 citations70
US7385689B2Jun 10, 2008
Method and apparatus for inspecting substrate pattern
SAMSUNG ELECTRONICS CO LTD5 citations60
US7081952B2Jul 25, 2006
Method and apparatus for obtaining an image using a selective combination of wavelengths of light
SAMSUNG ELECTRONICS CO LTD2 citations59
US6850332B2Feb 1, 2005
Method for measuring step difference in a semiconductor device and apparatus for performing the same
SAMSUNG ELECTRONICS CO LTD2 citations59
US6870948B2Mar 22, 2005
Method and apparatus for numerically analyzing grain growth on semiconductor wafer using SEM image
SAMSUNG ELECTRONICS CO LTD1 citations51
US7355729B2Apr 8, 2008
Apparatus and method for measuring a thickness of a substrate
SAMSUNG ELECTRONICS CO LTD1 citations49