Inventor
KIM HYO-HOO
KR2 patents
Patents
2 patentsUS6650408B2Nov 18, 2003
Method for inspecting a polishing pad in a semiconductor manufacturing process, an apparatus for performing the method, and a polishing device adopting the apparatus
SAMSUNG ELECTRONICS CO LTD12 citations70
US6850332B2Feb 1, 2005
Method for measuring step difference in a semiconductor device and apparatus for performing the same
SAMSUNG ELECTRONICS CO LTD2 citations59