Inventor

SMITH PETER G R

GB3 patents

Patents

3 patents

US7070702B1Jul 4, 2006

Pattern formation method using light-induced suppression of etching

QINETIQ LTD4 citations54

US6834151B1Dec 21, 2004

Optical waveguide and fabrication method

QINETIQ LTD5 citations52

US6344150B1Feb 5, 2002

Etching method

QINETIQ LTD0 citations44