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Inventor
ROSS GRAEME W
GB
3 patents
Patents
3 patents
US7070702B1
Jul 4, 2006
Pattern formation method using light-induced suppression of etching
QINETIQ LTD
4 citations
54
US6834151B1
Dec 21, 2004
Optical waveguide and fabrication method
QINETIQ LTD
5 citations
52
US6344150B1
Feb 5, 2002
Etching method
QINETIQ LTD
0 citations
44