Inventor
ISHITANI TOHRU
JP70 patents
⚠️ This page may combine multiple inventors who share the name “ISHITANI TOHRU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
38 patentsUS6664552B2Dec 16, 2003
Method and apparatus for specimen fabrication
HITACHI LTD139 citations99
US5270552ADec 14, 1993
Method for separating specimen and method for analyzing the specimen separated by the specimen separating method
HITACHI LTD247 citations99
US6734687B1May 11, 2004
Apparatus for detecting defect in device and method of detecting defect
HITACHI LTD134 citations98
US6310341B1Oct 30, 2001
Projecting type charged particle microscope and projecting type substrate inspection system
HITACHI LTD108 citations98
US5656811AAug 12, 1997
Method for making specimen and apparatus thereof
HITACHI LTD138 citations98
US4983540AJan 8, 1991
Method of manufacturing devices having superlattice structures
HITACHI LTD123 citations98
US6822245B2Nov 23, 2004
Ion beam apparatus and sample processing method
HITACHI LTD60 citations96
US6794663B2Sep 21, 2004
Method and apparatus for specimen fabrication
HITACHI LTD33 citations96
US5850326ADec 15, 1998
Narrow track thin film magnetic head suitable for high density recording and reproducing operations and fabrication method thereof wherein an air bearing surface has at least one groove containing a non-magnetic electrically conductive layer
HITACHI LTD45 citations96
US5113072AMay 12, 1992
Device having superlattice structure, and method of and apparatus for manufacturing the same
HITACHI LTD48 citations96
US4936968AJun 26, 1990
Ion-beam machining method and apparatus
HITACHI LTD61 citations96
US4774414ASep 27, 1988
Liquid metal ion source
HITACHI LTD56 citations96
US7236651B2Jun 26, 2007
Image evaluation method and microscope
HITACHI LTD16 citations93
US6627889B2Sep 30, 2003
Apparatus and method for observing sample using electron beam
HITACHI LTD21 citations93
US5399865AMar 21, 1995
Liquid metal ion source with high temperature cleaning apparatus for cleaning the emitter and reservoir
HITACHI LTD30 citations93
US4755685AJul 5, 1988
Ion micro beam apparatus
HITACHI LTD41 citations93
US4710632ADec 1, 1987
Ion microbeam apparatus
HITACHI LTD28 citations93
US4697086ASep 29, 1987
Apparatus for implanting ion microbeam
HITACHI LTD35 citations93
US7897936B2Mar 1, 2011
Method and apparatus for specimen fabrication
HITACHI LTD15 citations92
US7268356B2Sep 11, 2007
Method and apparatus for specimen fabrication
HITACHI LTD28 citations92
US7084399B2Aug 1, 2006
Ion beam apparatus and sample processing method
HITACHI LTD52 citations92
US6839200B2Jan 4, 2005
Combination perpendicular magnetic head having shield material formed at both ends of an upper pole of a write element
HITACHI LTD12 citations92
US6538844B2Mar 25, 2003
Method of fabricating a magnetic head by focused ion beam etching
HITACHI LTD13 citations92
US5120925AJun 9, 1992
Methods for device transplantation
HITACHI LTD28 citations92
US5065034ANov 12, 1991
Charged particle beam apparatus
HITACHI LTD39 citations90
US6521890B2Feb 18, 2003
Focused ion beam machining method and focused ion beam machining apparatus
HITACHI LTD25 citations89
US7186975B2Mar 6, 2007
Scanning charged-particle microscope
HITACHI LTD15 citations84
US4939364AJul 3, 1990
Specimen or substrate cutting method using focused charged particle beam and secondary ion spectroscopic analysis method utilizing the cutting method
HITACHI LTD21 citations82
US4680507AJul 14, 1987
Liquid metal ion source
HITACHI LTD21 citations78
US7340111B2Mar 4, 2008
Image evaluation method and microscope
HITACHI LTD6 citations74
US6307707B1Oct 23, 2001
Narrow track thin film head including magnetic poles machined by focused ion beam etching
HITACHI LTD4 citations74
US6278578B1Aug 21, 2001
Narrow track thin film head having a focused ion beam etched air bearing surface
HITACHI LTD4 citations74
US6111723AAug 29, 2000
Narrow track thin film magnetic head suitable for high density recording and reproducing operations and fabrication method thereof wherein an air bearing surface has at least one groove containing a non-magnetic electrically conductive layer
HITACHI LTD8 citations74
US4733134AMar 22, 1988
Liquid metal ion source with pulse generator control
HITACHI LTD10 citations74
US4567398AJan 28, 1986
Liquid metal ion source
HITACHI LTD10 citations74
US4479060AOct 23, 1984
Apparatus for irradiation with charged particle beams
HITACHI LTD11 citations74
US4438371AMar 20, 1984
Source of charged particles beam
HITACHI LTD12 citations74
US4233509ANov 11, 1980
Ion-electron analyzer
HITACHI LTD10 citations74
HITACHI HIGH TECH CORP
6 patentsUS7005651B2Feb 28, 2006
Liquid metal ion gun
HITACHI HIGH TECH CORP12 citations92
US7928377B2Apr 19, 2011
Charged particle beam apparatus and sample manufacturing method
HITACHI HIGH TECH CORP14 citations84
US7420181B2Sep 2, 2008
Liquid metal ion gun
HITACHI HIGH TECH CORP10 citations84
US7411192B2Aug 12, 2008
Focused ion beam apparatus and focused ion beam irradiation method
HITACHI HIGH TECH CORP12 citations84
US7482586B2Jan 27, 2009
Methods for sample preparation and observation, charged particle apparatus
HITACHI HIGH TECH CORP10 citations82
US7804073B2Sep 28, 2010
Liquid metal ion gun
HITACHI HIGH TECH CORP5 citations73
HITACHI ULSI SYS CO LTD
2 patentsSHICHI HIROYASU
2 patents(unassigned)
2 patentsShowing the top 50 of 70 patents by PatentIndex Score.