Inventor
KAMARTHY GOWRI
US15 patents
⚠️ This page may combine multiple inventors who share the name “KAMARTHY GOWRI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
12 patentsUS9245761B2Jan 26, 2016
Internal plasma grid for semiconductor fabrication
LAM RES CORP21 citations92
US10224221B2Mar 5, 2019
Internal plasma grid for semiconductor fabrication
LAM RES CORP7 citations84
US10141163B2Nov 27, 2018
Controlling ion energy within a plasma chamber
LAM RES CORP8 citations84
US9460894B2Oct 4, 2016
Controlling ion energy within a plasma chamber
LAM RES CORP11 citations84
US8852964B2Oct 7, 2014
Controlling CD and CD uniformity with trim time and temperature on a wafer by wafer basis
LAM RES CORP14 citations82
US9633846B2Apr 25, 2017
Internal plasma grid applications for semiconductor fabrication
LAM RES CORP8 citations81
US9230819B2Jan 5, 2016
Internal plasma grid applications for semiconductor fabrication in context of ion-ion plasma processing
LAM RES CORP15 citations81
US10424461B2Sep 24, 2019
Controlling ion energy within a plasma chamber
LAM RES CORP1 citations73
US9012243B2Apr 21, 2015
Controlling CD and CD uniformity with trim time and temperature on a wafer by wafer basis
LAM RES CORP4 citations71
US8671878B2Mar 18, 2014
Profile and CD uniformity control by plasma oxidation treatment
LAM RES CORP2 citations61
US9385003B1Jul 5, 2016
Residue free systems and methods for isotropically etching silicon in tight spaces
LAM RES CORP0 citations48
US9589853B2Mar 7, 2017
Method of planarizing an upper surface of a semiconductor substrate in a plasma etch chamber
LAM RES CORP0 citations41