Inventor

CHEN PU-FANG

TW19 patents

⚠️ This page may combine multiple inventors who share the name “CHEN PU-FANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHEN PU-FANG

TAIWAN SEMICONDUCTOR MFG CO LTD

Semiconductor structure and method for manufacturing the same

Apparatus and methods for effective impurity gettering

Structure for embedded gettering in a silicon on insulator wafer

Fabrication method of metal-free SOI wafer

Fabrication method of metal-free SOI wafer

Structure and method for embedded gettering in a silicon on insulator wafer

Semiconductor structure and method for manufacturing the same

Method for qualifying a semiconductor wafer for subsequent processing

Semiconductor device and manufacturing method thereof

Semiconductor device having a through-silicon via and manufacturing method thereof

Semiconductor substrate and manufacturing method of the same

Wafer strength by control of uniformity of edge bulk micro defects

Wafer supporting structure and method for forming the same

TAIWAN SEMICONDUCTOR MFG

Method and apparatus for measuring thickness of a thin oxide layer

Dopant implantation method using multi-step implants

Methods for forming field effect transistors and EPI-substrate

Preventing dosage drift with duplicate dose integrators

SYUE SEN HONG

Semiconductor structure and method

SYUE SEN-HONG

Wafer alignment system and method