Inventor
MURRAY CODY JOHN
US4 patents
Patents
4 patentsUS10545409B1Jan 28, 2020
Dynamic adjustment of post exposure bake during lithography utilizing real-time feedback for wafer exposure delay
IBM3 citations70
US11194254B2Dec 7, 2021
Lithography process delay characterization and effective dose compensation
IBM0 citations59
US11067896B2Jul 20, 2021
Dynamic adjustment of post exposure bake during lithography utilizing real-time feedback for wafer exposure delay
IBM0 citations59
US11182722B2Nov 23, 2021
Cognitive system for automatic risk assessment, solution identification, and action enablement
IBM0 citations50