Inventor
TIEGER DANIEL
US10 patents
⚠️ This page may combine multiple inventors who share the name “TIEGER DANIEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS11569063B2Jan 31, 2023
Apparatus, system and method for energy spread ion beam
APPLIED MATERIALS INC2 citations72
US11127557B1Sep 21, 2021
Ion source with single-slot tubular cathode
APPLIED MATERIALS INC5 citations72
US12592359B2Mar 31, 2026
Apparatus, system and method for energy spread ion beam
APPLIED MATERIALS INC0 citations62
USD1051838SNov 19, 2024
Single-slot tubular cathode
APPLIED MATERIALS INC0 citations61
US11631567B2Apr 18, 2023
Ion source with single-slot tubular cathode
APPLIED MATERIALS INC0 citations61
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
4 patentsUS10431421B2Oct 1, 2019
Apparatus and techniques for beam mapping in ion beam system
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations54
US10692697B2Jun 23, 2020
Apparatus and techniques for decelerated ion beam with no energy contamination
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations51
US10147584B2Dec 4, 2018
Apparatus and techniques for decelerated ion beam with no energy contamination
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations51
US9905396B1Feb 27, 2018
Curved post scan electrode
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations50