Inventor
COSTAS WESLEY D
US5 patents
Patents
5 patentsUS6328634B1Dec 11, 2001
Method of polishing
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US6607424B1Aug 19, 2003
Compositions for insulator and metal CMP and methods relating thereto
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US6679928B2Jan 20, 2004
Polishing composition having a surfactant
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US6443812B1Sep 3, 2002
Compositions for insulator and metal CMP and methods relating thereto
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US6568997B2May 27, 2003
CMP polishing composition for semiconductor devices containing organic polymer particles
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