Inventor
OHKURA RYOICHI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “OHKURA RYOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
S E S COMPANY LTD
5 patentsUS7029538B2Apr 18, 2006
Single wafer type substrate cleaning method and apparatus
S E S COMPANY LTD8 citations71
US6807974B2Oct 26, 2004
Single wafer type substrate cleaning method and apparatus
S E S COMPANY LTD11 citations71
US6792959B2Sep 21, 2004
Single wafer type cleaning method and apparatus
S E S COMPANY LTD2 citations60
US6752877B2Jun 22, 2004
Single wafer type cleaning method and apparatus
S E S COMPANY LTD4 citations60
US6763839B2Jul 20, 2004
Substrate cleaning system
S E S COMPANY LTD0 citations32