Inventor
WOLF ROBERT GREGORY
US9 patents
⚠️ This page may combine multiple inventors who share the name “WOLF ROBERT GREGORY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
RUDOLPH TECHNOLOGIES INC
5 patentsUS7006221B2Feb 28, 2006
Metrology system with spectroscopic ellipsometer and photoacoustic measurements
RUDOLPH TECHNOLOGIES INC21 citations90
US7522272B2Apr 21, 2009
Metrology system with spectroscopic ellipsometer and photoacoustic measurements
RUDOLPH TECHNOLOGIES INC7 citations71
US7253887B2Aug 7, 2007
Metrology system with spectroscopic ellipsometer and photoacoustic measurements
RUDOLPH TECHNOLOGIES INC2 citations60
US7705974B2Apr 27, 2010
Metrology system with spectroscopic ellipsometer and photoacoustic measurements
RUDOLPH TECHNOLOGIES INC0 citations50
US6886423B2May 3, 2005
Scalable, automated metrology system and method of making the system
RUDOLPH TECHNOLOGIES INC0 citations50
AIR PROD & CHEM
2 patentsWOLF ROBERT GREGORY
2 patentsUS8699027B2Apr 15, 2014
Multiple measurement techniques including focused beam scatterometry for characterization of samples
WOLF ROBERT GREGORY9 citations79
US8139232B2Mar 20, 2012
Multiple measurement techniques including focused beam scatterometry for characterization of samples
WOLF ROBERT GREGORY19 citations79