Inventor
MORATH CHRISTOPHER
US6 patents
Patents
6 patentsUS7006221B2Feb 28, 2006
Metrology system with spectroscopic ellipsometer and photoacoustic measurements
RUDOLPH TECHNOLOGIES INC21 citations90
US6504618B2Jan 7, 2003
Method and apparatus for decreasing thermal loading and roughness sensitivity in a photoacoustic film thickness measurement system
RUDOLPH TECHNOLOGIES INC29 citations90
US7050178B2May 23, 2006
Method and apparatus for increasing signal to noise ratio in a photoacoustic film thickness measurement system
RUDOLPH TECHNOLOGIES INC18 citations82
US7522272B2Apr 21, 2009
Metrology system with spectroscopic ellipsometer and photoacoustic measurements
RUDOLPH TECHNOLOGIES INC7 citations71
US7253887B2Aug 7, 2007
Metrology system with spectroscopic ellipsometer and photoacoustic measurements
RUDOLPH TECHNOLOGIES INC2 citations60
US7705974B2Apr 27, 2010
Metrology system with spectroscopic ellipsometer and photoacoustic measurements
RUDOLPH TECHNOLOGIES INC0 citations50