Inventor
KATAGIRI SOICHI
JP14 patents
⚠️ This page may combine multiple inventors who share the name “KATAGIRI SOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
11 patentsUS5222112AJun 22, 1993
X-ray pattern masking by a reflective reduction projection optical system
HITACHI LTD134 citations97
US6099393AAug 8, 2000
Polishing method for semiconductors and apparatus therefor
HITACHI LTD77 citations96
US5420436AMay 30, 1995
Methods for measuring optical system, and method and apparatus for exposure using said measuring method
HITACHI LTD61 citations94
US5408320AApr 18, 1995
Workpiece having alignment marks for positioning a pattern at a different pitch to be formed thereon, and method for fabricating the same
HITACHI LTD29 citations92
US5331369AJul 19, 1994
Method of forming patterns and apparatus for carrying out the same
HITACHI LTD37 citations90
US4857744AAug 15, 1989
Optical projection printing apparatus wherein wafer mark has a grating pitch in the sagittal plane of the first optical system
HITACHI LTD22 citations82
US5200798AApr 6, 1993
Method of position detection and the method and apparatus of printing patterns by use of the position detection method
HITACHI LTD14 citations73
US5164789ANov 17, 1992
Method and apparatus for measuring minute displacement by subject light diffracted and reflected from a grating to heterodyne interference
HITACHI LTD5 citations61
US6849542B2Feb 1, 2005
Method for manufacturing a semiconductor device that includes planarizing with a grindstone that contains fixed abrasives
HITACHI LTD2 citations59
US7166013B2Jan 23, 2007
Polishing apparatus and method for producing semiconductors using the apparatus
HITACHI LTD1 citations48
US7137866B2Nov 21, 2006
Polishing apparatus and method for producing semiconductors using the apparatus
HITACHI LTD0 citations38