Inventor
LANE LAWRENCE
US7 patents
⚠️ This page may combine multiple inventors who share the name “LANE LAWRENCE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TIMBRE TECH INC
6 patentsUS7065423B2Jun 20, 2006
Optical metrology model optimization for process control
TIMBRE TECH INC58 citations92
US7216045B2May 8, 2007
Selection of wavelengths for integrated circuit optical metrology
TIMBRE TECH INC22 citations90
US7395132B2Jul 1, 2008
Optical metrology model optimization for process control
TIMBRE TECH INC11 citations82
US7394554B2Jul 1, 2008
Selecting a hypothetical profile to use in optical metrology
TIMBRE TECH INC10 citations82
US6608686B1Aug 19, 2003
Measurement of metal electroplating and seed layer thickness and profile
TIMBRE TECH INC6 citations62
US7474993B2Jan 6, 2009
Selection of wavelengths for integrated circuit optical metrology
TIMBRE TECH INC0 citations51