Inventor
YAN WENDY
US4 patents
⚠️ This page may combine multiple inventors who share the name “YAN WENDY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
3 patentsUS6686296B1Feb 3, 2004
Nitrogen-based highly polymerizing plasma process for etching of organic materials in semiconductor manufacturing
IBM13 citations83
US6903023B2Jun 7, 2005
In-situ plasma etch for TERA hard mask materials
IBM15 citations80
US6228279B1May 8, 2001
High-density plasma, organic anti-reflective coating etch system compatible with sensitive photoresist materials
IBM9 citations71