Inventor
KHODYKIN OLEH V
US8 patents
⚠️ This page may combine multiple inventors who share the name “KHODYKIN OLEH V”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
6 patentsUS7872245B2Jan 18, 2011
Systems and methods for target material delivery in a laser produced plasma EUV light source
CYMER INC90 citations97
US7589337B2Sep 15, 2009
LPP EUV plasma source material target delivery system
CYMER INC23 citations92
US7465946B2Dec 16, 2008
Alternative fuels for EUV light source
CYMER INC40 citations92
US7928417B2Apr 19, 2011
LPP EUV light source drive laser system
CYMER INC11 citations84
US7960701B2Jun 14, 2011
EUV light source components and methods for producing, using and refurbishing same
CYMER INC8 citations83
US8686370B2Apr 1, 2014
EUV light source components and methods for producing, using and refurbishing same
CYMER INC3 citations61