Inventor

LOERCHER ROLAND

DE2 patents

⚠️ This page may combine multiple inventors who share the name “LOERCHER ROLAND”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

WEISSENRIEDER KARL-STEFAN

1 patent

US8928980B2Jan 6, 2015

Micromirror arrangement having a coating and method for the production thereof

WEISSENRIEDER KARL-STEFAN3 citations50

MUELLENDER STEPHAN

1 patent

US9494718B2Nov 15, 2016

Mirror for the EUV wavelength range, substrate for such a mirror, projection objective for microlithography comprising such a mirror or such a substrate, and projection exposure apparatus for microlithography comprising such a projection objective

MUELLENDER STEPHAN0 citations31