Inventor

KIMOTO MASAKUNI

JP4 patents

Patents

4 patents

US9729038B2Aug 8, 2017

Actuator device and mirror drive device

HAMAMATSU PHOTONICS KK26 citations90

US10549981B2Feb 4, 2020

Mirror drive device and method for producing same

HAMAMATSU PHOTONICS KK20 citations83

US10394017B2Aug 27, 2019

Actuator device and mirror drive device

HAMAMATSU PHOTONICS KK3 citations69

US9766448B2Sep 19, 2017

Mirror drive device

HAMAMATSU PHOTONICS KK6 citations69