Inventor
KIM HYUN HWA
KP3 patents
Patents
3 patentsUS10026590B2Jul 17, 2018
Fiducial design for tilted or glancing mill operations with a charged particle beam
FEI CO3 citations71
US9488554B2Nov 8, 2016
Method and system for reducing curtaining in charged particle beam sample preparation
FEI CO4 citations71
US11315756B2Apr 26, 2022
Fiducial design for tilted or glancing mill operations with a charged particle beam
FEI CO0 citations61