Inventor
DANEN ROBERT
US7 patents
Patents
7 patentsUS9709510B2Jul 18, 2017
Determining a configuration for an optical element positioned in a collection aperture during wafer inspection
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US9989479B1Jun 5, 2018
System and method to determine depth for optical wafer inspection
KLA TENCOR CORP6 citations81
US9389349B2Jul 12, 2016
System and method to determine depth for optical wafer inspection
KLA TENCOR CORP12 citations81
US7710564B1May 4, 2010
Polarized broadband wafer inspection
KLA TENCOR CORP2 citations61
US10249546B2Apr 2, 2019
Reverse decoration for defect detection amplification
KLA TENCOR CORP0 citations49
US10215713B2Feb 26, 2019
Determining a configuration for an optical element positioned in a collection aperture during wafer inspection
KLA TENCOR CORP0 citations48
US10621718B2Apr 14, 2020
Aided image reconstruction
KLA TENCOR CORP0 citations37