Inventor
TRIVEDI SAGAR
US4 patents
Patents
4 patentsUS11340584B2May 24, 2022
Synchronized parallel tile computation for large area lithography simulation
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US10915090B2Feb 9, 2021
Synchronized parallel tile computation for large area lithography simulation
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US11747786B2Sep 5, 2023
Synchronized parallel tile computation for large area lithography simulation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12436466B2Oct 7, 2025
Optimized mask stitching
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47