Inventor
XU FANGBO
US4 patents
Patents
4 patentsUS10671052B2Jun 2, 2020
Synchronized parallel tile computation for large area lithography simulation
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations79
US11340584B2May 24, 2022
Synchronized parallel tile computation for large area lithography simulation
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US10915090B2Feb 9, 2021
Synchronized parallel tile computation for large area lithography simulation
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US11747786B2Sep 5, 2023
Synchronized parallel tile computation for large area lithography simulation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59