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Inventor

FURY MICHAEL A

US9 patents
⚠️ This page may combine multiple inventors who share the name “FURY MICHAEL A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EKC TECHNOLOGY INC

5 patents
US6566276B2May 20, 2003

Method of making electronic materials

EKC TECHNOLOGY INC85 citations97
US6696363B2Feb 24, 2004

Method of and apparatus for substrate pre-treatment

EKC TECHNOLOGY INC30 citations90
US7361231B2Apr 22, 2008

System and method for mid-pressure dense phase gas and ultrasonic cleaning

EKC TECHNOLOGY INC36 citations86
US7226512B2Jun 5, 2007

Load lock system for supercritical fluid cleaning

EKC TECHNOLOGY INC11 citations79
US6857437B2Feb 22, 2005

Automated dense phase fluid cleaning system

EKC TECHNOLOGY INC8 citations69

IBM

2 patents
US5284549AFeb 8, 1994

Selective fluorocarbon-based RIE process utilizing a nitrogen additive

IBM36 citations91
US4340618AJul 20, 1982

Process for forming refractory metal layers on ceramic substrate

IBM28 citations81

UNIV FRASER SIMON

1 patent
US7074640B2Jul 11, 2006

Method of making barrier layers

UNIV FRASER SIMON22 citations92

HONEYWELL INT INC

1 patent
US6464740B1Oct 15, 2002

Reactive aqueous metal oxide sols as polishing slurries for low dielectric constant materials

HONEYWELL INT INC36 citations86