Inventor
LEE SEUNGYOON
KR19 patents
⚠️ This page may combine multiple inventors who share the name “LEE SEUNGYOON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
13 patentsUS11537042B2Dec 27, 2022
Overlay correcting method, and photolithography method, semiconductor device manufacturing method and scanner system based on the overlay correcting method
SAMSUNG ELECTRONICS CO LTD3 citations72
US10566252B2Feb 18, 2020
Overlay-correction method and a control system using the same
SAMSUNG ELECTRONICS CO LTD2 citations72
US9747682B2Aug 29, 2017
Methods for measuring overlays
SAMSUNG ELECTRONICS CO LTD3 citations72
US11422455B2Aug 23, 2022
EUV exposure apparatus, and overlay correction method and semiconductor device fabricating method using the same
SAMSUNG ELECTRONICS CO LTD2 citations70
US11137673B1Oct 5, 2021
EUV exposure apparatus, and overlay correction method and semiconductor device fabricating method using the same
SAMSUNG ELECTRONICS CO LTD4 citations70
US11921421B2Mar 5, 2024
Overlay correcting method, and photolithography method, semiconductor device manufacturing method and scanner system based on the overlay correcting method
SAMSUNG ELECTRONICS CO LTD0 citations61
US12585199B2Mar 24, 2026
Overlay correction method, and exposure method and semiconductor device manufacturing method including overlay correction method
SAMSUNG ELECTRONICS CO LTD0 citations60
US12542360B2Feb 3, 2026
Laminated patch antenna, antenna array, and antenna package
SAMSUNG ELECTRONICS CO LTD0 citations59
US11526087B2Dec 13, 2022
Method of manufacturing a semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations49
US11456222B2Sep 27, 2022
Overlay correction method and semiconductor fabrication method including the same
SAMSUNG ELECTRONICS CO LTD0 citations49
US12593660B2Mar 31, 2026
Method of manufacturing semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations47
US12567897B2Mar 3, 2026
Reconfigurable intelligent surface forming multiple resonances
SAMSUNG ELECTRONICS CO LTD0 citations47
US11796923B2Oct 24, 2023
Overlay correction method, method of evaluating overlay correction operation, and method of fabricating semiconductor device using the overlay correction method
SAMSUNG ELECTRONICS CO LTD0 citations43