Inventor
SUZUKI AYUTA
JP10 patents
⚠️ This page may combine multiple inventors who share the name “SUZUKI AYUTA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
8 patentsUS12211676B2Jan 28, 2025
Measurement system, measurement method, and plasma processing device
TOKYO ELECTRON LTD0 citations61
US11664198B2May 30, 2023
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations60
US10643839B2May 5, 2020
Film forming apparatus and film forming method
TOKYO ELECTRON LTD1 citations60
US12027344B2Jul 2, 2024
Film forming apparatus
TOKYO ELECTRON LTD0 citations49
US9441292B2Sep 13, 2016
Etching method, etching apparatus, and ring member
TOKYO ELECTRON LTD0 citations49
US10121680B2Nov 6, 2018
Substrate processing apparatus
TOKYO ELECTRON LTD0 citations40
US10734221B2Aug 4, 2020
Method of manufacturing semiconductor device and method of forming metal oxide film
TOKYO ELECTRON LTD0 citations39
US10847348B2Nov 24, 2020
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations37