Inventor
ARIMA EIJI
JP5 patents
Patents
5 patentsUS12025569B2Jul 2, 2024
Defect inspection device and inspection method, and optical module
HITACHI HIGH TECH CORP0 citations50
US12400889B2Aug 26, 2025
Defect inspection device
HITACHI HIGH TECH CORP0 citations49
US12366538B2Jul 22, 2025
Defect inspection apparatus and defect inspection method
HITACHI HIGH TECH CORP0 citations49
US12146840B2Nov 19, 2024
Defect inspection device
HITACHI HIGH TECH CORP0 citations49
US12345654B2Jul 1, 2025
Defect inspection device, defect inspection method, and adjustment substrate
HITACHI HIGH TECH CORP0 citations48