Inventor

WILTSHIRE TIMOTHY J

US5 patents

⚠️ This page may combine multiple inventors who share the name “WILTSHIRE TIMOTHY J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

4 patents

US5877861AMar 2, 1999

Method for overlay control system

IBM273 citations97

US6436595B1Aug 20, 2002

Method of aligning lithographically printed product layers using non-zero overlay targets

IBM32 citations88

US6660456B2Dec 9, 2003

Technique for the size reduction of vias and other images in semiconductor chips

IBM8 citations70

US8039366B2Oct 18, 2011

Method for providing rotationally symmetric alignment marks for an alignment system that requires asymmetric geometric layout

IBM3 citations56

GLOBALFOUNDRIES INC

1 patent

US10095115B2Oct 9, 2018

Forming edge etch protection using dual layer of positive-negative tone resists

GLOBALFOUNDRIES INC0 citations43