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Inventor
VASAT JIRI L
US
2 patents
Patents
2 patents
US6743495B2
Jun 1, 2004
Thermal annealing process for producing silicon wafers with improved surface characteristics
MEMC ELECTRONIC MATERIALS
43 citations
88
US6376395B2
Apr 23, 2002
Semiconductor wafer manufacturing process
MEMC ELECTRONIC MATERIALS
30 citations
85