Inventor
EBATA SATOSHI
JP7 patents
Patents
7 patentsUS6908722B2Jun 21, 2005
Acid generator, sulfonic acid, sulfonic acid derivatives and radiation-sensitive resin composition
JSR CORP200 citations98
US6503570B2Jan 7, 2003
Cyclosilane compound, and solution composition and process for forming a silicon film
JSR CORP64 citations95
US7371503B2May 13, 2008
Sulfonium salt compound, photoacid generator, and positive-tone radiation-sensitive resin composition
JSR CORP12 citations78
US6875518B2Apr 5, 2005
Ruthenium film, ruthenium oxide film and process for forming the same
JSR CORP8 citations73
US8043786B2Oct 25, 2011
Acid generators, sulfonic acids, sulfonyl halides, and radiation sensitive resin compositions
JSR CORP5 citations62
US7268196B2Sep 11, 2007
Process for producing cycloolefin addition polymer
JSR CORP3 citations61
US7241847B2Jul 10, 2007
Process for producing cycloolefin addition polymer
JSR CORP2 citations61