Inventor

YAKUPOGLU HALIT N

US3 patents

⚠️ This page may combine multiple inventors who share the name “YAKUPOGLU HALIT N”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASM NUTOOL INC

2 patents

US6852630B2Feb 8, 2005

Electroetching process and system

ASM NUTOOL INC73 citations96

US7097755B2Aug 29, 2006

Electrochemical mechanical processing with advancible sweeper

ASM NUTOOL INC3 citations61

NOVELLUS SYSTEMS INC

1 patent

US7250104B2Jul 31, 2007

Method and system for optically enhanced metal planarization

NOVELLUS SYSTEMS INC6 citations61