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Inventor
GRABOLLA THOMAS
DE
2 patents
⚠️ This page may combine multiple inventors who share the name “GRABOLLA THOMAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GRABOLLA THOMAS
1 patent
US8932405B2
Jan 13, 2015
Apparatus for low-temperature epitaxy on a plurality semiconductor substrates
GRABOLLA THOMAS
1 citations
37
IHP GMBH
1 patent
US7244667B2
Jul 17, 2007
Method and device for the production of thin epitaxial semiconductor layers
IHP GMBH
0 citations
30