Inventor

LANGE STEVEN R

US24 patents

⚠️ This page may combine multiple inventors who share the name “LANGE STEVEN R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LANGE STEVEN R

KLA TENCOR CORP

System and method for inspecting semiconductor wafers

System and method for inspecting semiconductor wafers

Apparatus and methods for determining defect depths in vertical stack memory

System and method for imaging a sample with a laser sustained plasma illumination output

Apparatus and methods for detecting defects in vertical memory

Multi-spectral defect inspection for 3D wafers

Apparatus and methods for detecting defects in vertical memory

Inspection systems and techniques with enhanced detection

System and method for x-ray imaging and classification of volume defects

KLA TENCOR TECH CORP

Systems for inspecting wafers and reticles with increased resolution

Inspection system with multiple illumination sources

All-reflective optical systems for broadband wafer inspection

Uniform pupil illumination for optical inspection systems

Wafer inspection using optimized geometry

Multi-detector microscopic inspection system

Method and apparatus for inspecting a substrate using a plurality of inspection wavelength regimes

Radiation damage reduction

WYKO CORP

Phase shifting device and method

Method and apparatus for measuring corneal topography

Alignment system and method for infrared interferometer

LANGE STEVEN R

Hollow core synthetic fireplace log and method and apparatus for producing same

Optical defect amplification for improved sensitivity on patterned layers

KLA TENOR CORP

Apparatus and methods for reducing thin film color variation in optical inspection of semiconductor devices and other surfaces

KLA—TENCOR CORP

Inspection systems and techniques with enhanced detection