Inventor
PAN WANLING
BE8 patents
⚠️ This page may combine multiple inventors who share the name “PAN WANLING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
PAN WANLING
4 patentsUS8633635B1Jan 21, 2014
Microelectromechanical resonators with thermally-actuated frequency tuning beams
PAN WANLING20 citations89
US8283256B1Oct 9, 2012
Methods of forming microdevice substrates using double-sided alignment techniques
PAN WANLING9 citations82
US8501515B1Aug 6, 2013
Methods of forming micro-electromechanical resonators using passive compensation techniques
PAN WANLING8 citations81
US8680931B1Mar 25, 2014
Periodic signal generators having microelectromechanical resonators therein that support surface wave and bulk acoustic wave modes of operation with different temperature coefficients of frequency
PAN WANLING2 citations60
INTEGRATED DEVICE TECH
2 patentsUS9090451B1Jul 28, 2015
Microelectromechanical resonators having offset [100] and [110] crystal orientations
INTEGRATED DEVICE TECH8 citations82
US8785229B1Jul 22, 2014
Methods of forming micro-electromechanical resonators having passive temperature compensation regions therein
INTEGRATED DEVICE TECH0 citations50