P

Inventor

HUANG CHIEN-KUO

TW9 patents
⚠️ This page may combine multiple inventors who share the name “HUANG CHIEN-KUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

6 patents
US11053584B2Jul 6, 2021

System and method for supplying a precursor for an atomic layer deposition (ALD) process

TAIWAN SEMICONDUCTOR MFG CO LTD278 citations98
US10443127B2Oct 15, 2019

System and method for supplying a precursor for an atomic layer deposition (ALD) process

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US10008367B2Jun 26, 2018

Gas diffuser unit, process chamber and wafer processing method

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations71
US10011532B2Jul 3, 2018

Remote plasma system and method

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US12394602B2Aug 19, 2025

Wafer processing method

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10741366B2Aug 11, 2020

Process chamber and wafer processing method

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50

CHEN FEI-FAN

1 patent
US8944003B2Feb 3, 2015

Remote plasma system and method

CHEN FEI-FAN8 citations76

HUANG CHIEN-KUO

1 patent
US7936117B2May 3, 2011

Structure of spark plug

HUANG CHIEN-KUO1 citations43

LIU WEN-CHUAN

1 patent
US8158546B2Apr 17, 2012

Transparent aqua-based nano sol-gel composition and method of applying the same

LIU WEN-CHUAN0 citations38