Inventor
NAGANO HITOSHI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “NAGANO HITOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GIGAPHOTON INC
5 patentsUS11477877B2Oct 18, 2022
Laser apparatus for generating extreme ultraviolet light
GIGAPHOTON INC2 citations72
US10764986B2Sep 1, 2020
Extreme ultraviolet light generation apparatus
GIGAPHOTON INC2 citations72
US10314152B2Jun 4, 2019
Extreme ultraviolet light generation apparatus
GIGAPHOTON INC2 citations72
US9510433B2Nov 29, 2016
Extreme ultraviolet light generation apparatus
GIGAPHOTON INC2 citations62
US10512148B2Dec 17, 2019
System and method for generating extreme ultraviolet light employing laser pulse including pedestal
GIGAPHOTON INC0 citations51