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Inventor
LALOVIC IVAN B
US
2 patents
⚠️ This page may combine multiple inventors who share the name “LALOVIC IVAN B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEONG NAKGEUON
1 patent
US8520186B2
Aug 27, 2013
Active spectral control of optical source
SEONG NAKGEUON
11 citations
76
Cymer LLC
1 patent
US9709897B2
Jul 18, 2017
Polarization control of pulsed light beam
Cymer LLC
1 citations
48